Pumping Speed of Parallel-Louvre-Blind-Type Cryopumps. Hydrogen Pumping Speed of Cryopump with Multiple Parallel Mounted Panels.
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
سال: 1993
ISSN: 0387-5016,1884-8346
DOI: 10.1299/kikaib.59.1646